Advanced Ceramic Components
Focused on semiconductor ceramic devices, the solution covers full-site testing, inspection, sorting, and repair to improve chip reliability.
HTCC / LTCC Green Tape Product Line
GR3500 Visual Inspection Equipment — High-Precision Printed Patterns
The ME inspection machine series of visual inspection equipment is purpose-built for high-precision printed pattern inspection of advanced ceramic components. It is suitable for visual inspection of various surface pattern traces across different process stages of green and fired ceramics, including screen printing, photolithographic traces, and etched traces. It covers products such as LTCC/HTCC printed green sheets, resistors, thin-film circuits, and thick-film circuits, ensuring production quality with high precision, high efficiency, and a low false-reject rate.
Product Advantages
Ultra-High-Precision Inspection：Maximum pixel accuracy of 1μm with repeatability of ±1μm; standard accuracy of 3μm pixel with repeatability of ±3μm. Selectable accuracy tiers meet the stringent requirements of different process stages.
Comprehensive Defect Coverage：Detects a wide range of defects including breaks, shorts, whiskers, chips, overflow, ink bleeding, pinholes, bumps, depressions, pattern misalignment, abnormal line width, abnormal spacing, surface foreign matter, missing patterns, extra patterns, and via-fill-related defects.
Extremely Low False-Reject Rate：Over-kill rate of only 0.01% and escape rate of only 0.001%, ensuring high reliability and reducing cost losses caused by false rejects.
High-Efficiency Inspection：Inspection time of only 6 sec/piece for 200mm products, meeting the high-speed takt requirements of production lines.
Intelligent Marking and Traceability：After NG identification, laser micro/nano processing or laser/inkjet marking can be performed, and unified marking after stacking NG data is supported, facilitating traceability and downstream handling.
Product Functions
Product Specifications
- Inspection Target：
- Screen printing / photolithographic traces / etched tracesSuitable for various process stages
- Maximum Accuracy：
- Pixel 1μm, repeatability ±1μmSelectable accuracy tiers
- Standard Accuracy：
- Pixel 3μm, repeatability ±3μm
- Inspection Efficiency：
- 6s/piece200mm products
- Over-Kill Rate：
- 0.01%
- Escape Rate：
- 0.001%
Applications
LTCC/HTCC Printed Green Sheets：Inspects printed patterns on green/fired ceramic sheets to ensure trace integrity, suitable for multilayer ceramic substrate manufacturing.
Thin-Film and Thick-Film Circuits：Applied to visual inspection of thin-film and thick-film circuits, ensuring pattern accuracy and surface quality.
Resistors and Conductor Traces：Inspects the print quality of resistors and conductor traces, controlling key parameters such as line width and spacing.